Beryllium implantation induced deep level defects in p-type 6H–silicon carbide

نویسندگان

  • X. D. Chen
  • C. C. Ling
  • S. Fung
  • C. D. Beling
  • M. Gong
  • N. Kobayashi
چکیده

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تاریخ انتشار 2003